气浮直线电机平台1

FiberBeam直线电机定位平台家族的独特设计用于精密光学调整和装配系统。行程20, 50,和100mm ，全部采用低矮外形设计仅50mm高。

• 定位精度： < ±1?m /25mm。
• 速度：15毫秒实现小于20纳米的运动—可实现1?m以内的运动和稳定。
• 分辨率：100，40，20，10，1 nm可选。
• 双向重复性：±1个计数。

FiberBeam Linear Motor Positioner
◆ Non-contact air bearing, linear motor stage
◆ Non-contact optical encoder with resolutions to 1 nanometer
◆ 1 micron move and settle times of 15 ms to within 20 nanometers

Air Bearing, Linear Motor Positioner
The FiberBeam Family of Linear Motor Positioners are specifically designed to meet the demands of photonic alignment and assembly systems. With travels of 20, 50, and 100mm, all share a very low profile of only 50mm.

FiberBeam Linear Motor Positioners incorporate a unique moving magnet/moving glass design which locates all cables and connectors in a stationary base, avoiding any cable influence on stage movement. Design simplicity makes these positioners ideally suited to cleanroom applications: the carriage floats over a featureless, precision-ground base.

For high-resolution applications demanding rapid settling, the FiberBeam Stages are an ideal match to our NanoDrive Linear Amplifier series of ultra-low noise and low distortion sinusoidal amplifiers.

The FiberBeam Stages incorporate proprietary porous bearing technology, avoiding the clogging problems common to orifice bearing designs. All models bolt together directly to form X-Y assemblies without the need for adapter plates. The height of such a stack is a low 100mm.

Right angle brackets and frictionless spring or air counterbalances are available to permit vertical operation. This allows three axis X-Y-Z assemblies to be easily configured. Dual carriage/single base versions can also be supplied, where the motion of the two carriages is parallel to less than 2 arc-seconds.

In constant velocity applications, tracking errors during motion can be held to +/- 10 nanometers. The use of a single phase, brushless motor in the FiberBeam 20 stage provides the high performance of sinusoidal commutation from brush-type amplifiers no commutation required.