AE射频电源

上海财盈电子有限公司于2005年1月成立，紧靠上海闵行莘庄工业区, 现有员工16名，5年以上维修技术工程师，维修技术员10名。半导体设备电源，直流电源RF GENERATOR、 MICROWAVE POWER SOURCEAE微波发生器维修专家。

1、半导体制造、LED光电材料、太阳能、平板显示、汽车电子等行业的离子注入、扩散、光刻、PVD物理气相沉积，CVD 化学气相沉积，PECVD等离子增强化学气象沉积，溅射薄膜、蚀刻 等工艺。

 

2、 HV PSU高压电源、DC PSU大功率直流电源、RF Generator射频电源、MICROWAVE POWER SOURCEAE微波发生器、触摸屏人机界面、PCB板，涉及设备品牌有AE（Advanced Energy)、ENI(MKS)、DAIHEN、SEREN、Glassman、  

      Spellman、LAMBDA、SORENSEN、Delta、AMAT、Nikon、Varian、Lam、Nissin、ASML等。

 

3、维修机台涉及Lam9400、Lam9100、Varian E500,、Varian E200、AMAT PI9500、PI9200、XR80,  Nissin  

       Exceed2000AH、Axcelis/EATON NV6200、PVD、CVD、PECVD、溅射镀膜设备等。

       

     公司配备专用维修、检测和负载测试工具，有多年的丰富维修经验高级工程师队伍，质量可靠，价格合理，提供保修，     

      维修前先订合同，确认后再维修。部分型号可提供备品应急。

上海财盈电子有限公司专业维修高压电源，PVD、 CVD镀膜RF射频电源，直流电源、多路输出电源、逆变电源、驱动器、伺服放大器、工业电路板、人机界面等，维修ENI电源型号如下：

MKS ENI QL10513 

C77901 Anelva PRF-246C RF Power Supply 2.4kW 13.560MHz

Drytek Dual 13.56 MHz RF Power Source model 2600422 POWER generator supply 1000W

Plasma-Therm HFS-1000E RF Generator Power Supply, 1 KW

Power supply, ENI EGS500 with MT-7 transformer

ENI DCG-200A Optima 20kW DC Power Supply 0190-13797

ENI DCG-200 20kW DC Power Supply DCG-200Z 0190-22954

ENI DCG-200 DC Power Supply Master 40kW 0190-08033

ENI DCG-200 DC Power Supply Master 0190-07964 Rev.G

ENI MRC ACG-10-01 13.56MHZ RF Generator Power Supply

ENI DCG-200E DC Power Supply Master 0190-22934

ENI Polara 260A DC Pulsed Bipolar Power Supply

ENI DCG-200Z DC Power Supply Slave 0190-08034

ENI DCG-200 DC Power Supply Slave DCG-200Z 0190-07969

ENI DCG-200Z DC Power Supply Slave 0190-07965

ENI DCG-100A 10kW DC Power Supply 0190-02973

ENI DCG-200E DC Power Supply Slave 0190-22935

ENI DCG-200Z DC Power Supply 0190-07964

ENI DCG-200Z DC Power Supply Slave 0190-07965

ENI Optima DCG-200Z DC Power Supply Slave 0190-07969

ENI Polara 260 Bipolar Pulsed Power Supply Untested

ENI DCG-200 200Z DC Master Power Supply 0190-08033

ENI DCG-200Z DC Power Supply Slave 0190-07207 untested

ENI DCG-200Z DC Power Supply Slave 0190-08034

ENI Polara 260 DC Power Supply 0190-01428

ENI DCG-200Z DC Power Supply Slave 0190-07965

ENI Plasmaloc 3 3000-Watt RF Power Supply PL-3

ENI Model: OEM-650A XL RF Power Supply, Untested

ENI DCG-200Z Slave 20kW DC Power Supply 0190-07965

 MKS ENI RF GENERATOR  QL10513

MKS ENI DPGD-10 Power Supply, AMAT: 0190-36275

MKS ENI DCG-100 DC Magnetron Power Supply 200-208V

ENI DCG-200Z DCG-200 Master DC Power Supply 0190-07964

ENI Optima DCG-200 DC Power Supply Slave

ENI EIB-4D RF Power Supply Matching Capacitor/Transformer 60Khz 1200V 226A

AMAT ENI POLARA 260A PULSED POWER SUPPLY 0190-01428

ENI OEM-12A RF Power Generator 13.56 MHz Vacuum Supply

MKS ENI PLASMALOC PL-2HF-11451 RF POWER SUPPLY LOW FREQ 

MKS ENI PLASMALOC PL-2HF/PE RF POWER SUPPLY LOW FREQ

MKS ENI ACG-10 RF 13.56 MHz Power Supply: Rebuilt

MKS ENI GMW-50A RF Power Supply, 2MHz AMAT: 0190-13202

MKS ENI GHW-55A, RF Power Supply, 50A 13.56 MHz Rebuilt

MKS ENI PLASMALOC PL-2HF RF POWER SUPPLY LOW FREQ

ENI HF-300 Power Supply HF300T

ENI DCG-200A OPTIMA POWER SUPPLY

ENI Power Systems Plasmaloc PL3-HF 3-HF RF Power Supply 3000W 25-125kW

ENI Genesis GHW-85A Generator Power Supply Controller

MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320

MKS ENI GHW-12Z 13.56 MHz Power Supply: AMAT 0190-06988

ENI POLARA-260A POWER SUPPLY