硅外延片

厂商 ：北京特博万德科技有限公司

北京 北京
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商品详细描述
提供各种尺寸的硅外延片

电阻率及外延厚度都可按客户要求定制

Certificate of Quality Conformance
 
Customer
  
Product Model
 N/N+
 Production Number
 07-3
Quantity
 96pcs
 Date
 2007-4-20
EPI Layer Characteristics
Item
 Characteristics
 Uint
 Spec
1.1
 Type/Dopant
 ---
 N/PH3
1.2
 Thinkness
 μm
 25±2.5
1.3
 Thinkness Uniformity
 %
 <4%
1.4
 Resistivity
 Ohm-cm
 0.0338-0.0388
1.5
 Resistivity Uniformity
 %
 <5%
1.6
 Haze
 ---
 None
1.7
 Slip Line
 Strip
 <5(total length<100mm)
1.8
 Scratch
 mm
 None
1.9
 Point DefectTotal Number
 ea
 <15
1.10
 Dimple
 ea
 ≤3
1.11
 Stacking Fault
 ea
 <10/cm2
1.12
 Orange Pell,Crack,Crows’ feet,
Chip,Mound,Lamella
 ---
 None
1.13
 Edge Crown
 ---
 <1/3 EPI THK
1.14
 Foreign Matter
 ---
 None
1.15
 Back Surface Contamination
 ---
 None
Substrate Characteristis
2.1
 Production Way
 ---
 CZ
2.2
 Dopant
 ---
 Sb
2.3
 Diameter
 mm
 100±0.2
2.4
 Resistivity
 Ohm-cm
 0.003-0.004
2.5
 Crystallographic Direction
 Deg.
 <111>4±0.5
2.6
 Thinkness
 μm
 460±20　
2.7
 TTV
 μm
 ≤10
2.8
 Warp/Bow
 μm
 ≤30
2.9
 Dislocation Density
 /cm2
 100
2.10
 Other
 ---
 SEMI Standard
 
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