厂商 ：安徽拓吉泰新型陶瓷科技有限公司
安徽 合肥市- 主营产品：
- AZO靶材
- ITO靶材/粉体
- 氧化陶瓷靶材
喷涂氧化铌靶材 Spray NbOx Target
产品说明Product description
以等离子体为热源将Nb2O5粉末加热到熔融或半熔融状态并高速冲击背管表面形成致密涂层，从而制备出高纯度、高致密度NbOx靶材。
With plasma as heat source, high purity and high density NbOx target is produced from Nb2O5 powder, which is heated to molten or semi-molten state and deposited on the surface of backing tube at high speeds to form dense coatings.
|
项目 Item |
参数 Specifications |
检测手段 Testing method |
|
纯度 Purity |
≥99.9% |
|
|
密度 Density |
≥4.7 g/cm3 |
阿基米德密度仪 Archimedes densimeter |
|
杂质含量 Impurities
|
Ta: ≤200 ppm Si: ≤80 ppm Fe: ≤80 ppm Al: ≤30 ppm W: ≤30 ppm Cu: ≤30 ppm 杂质总和 (Total impurity)：≤1000 ppm |
化学分析 Chemical analysis |
|
电阻率 Electrical resistivity |
≤0.2 Ω?cm |
四探针电阻率仪 Four probe resistivity meter |
|
建议功率 Recommended power |
15 kw/m |
|
背管材质 Backing tube
-选用304/316L不锈钢（无磁）。
304/316L stainless steel (non-magnetic).
靶材尺寸Dimension
-按照图纸要求加工
According to the customized drawings.
应用领域Applications
-主要用于LOW-E镀膜玻璃，薄膜太阳能电池电极膜系，TFT-LCD，半导体电子。
LOW-E glasses, electrodes of thin film solar cells, TFT-LCD, semiconductor devices.
