FC-3283检漏液

3M氟化液FC-3283是无色透明全氟化学品，具有良好的化学惰性、电气绝缘性能、热传导性和独特的第表面张力广泛应用于半导体制造厂作为热传导介质。其液体温度范围为-50°C 至128°C，主要应用于蚀刻设备、离子注入设备、测试设备及其他设备。因为FC-3283是单一组分，所以其成分不好出现降解或者过期。FC-3283沸点高，其随时间的挥发也比较少。 3M Fluorinert Electronic Liquid FC-3283 is a clear, colorless, thermally stable,fully-?uorinated liquid ideal for use in many single phase heat transfer applications in the semiconductor manufacturing industry. Its liquid range (-50°C to 128°C) makes it ideal for a variety of applications such as etchers, ion implanters, testers and others. Because Fluorinert liquid FC-3283 is primarily a single compound, its composition will not shift or fractionate with time. This keeps ?uid loss to a minimum and insures that transport properties will not change with time